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ion implantation tungsten

  • Tribo Surface Engineering

    For example, in a gear life test comparing untreated, shot peened and implanted carburized gears, we saw a 25x increase in gear life from implantation over the untreated piece. Ion Implanted Tungsten carbide drills and endmills have seen 300% increases in lifetime and greater while cutting a …[...]

  • Helium-Ion-Implantation in Tungsten: Progress towards a ...

    At present it is not yet possible to exactly replicate the conditions inside future fusion reactors. Fortunately many aspects of the damage produced by ion and neutron bombardment can be replicated using ion-implantation. Extensive studies have been carried out using tungsten self-ion bombardment to mimic the damage produced by neutron irradiation.[...]

  • Tungsten & Molybdenum Ion Implant Parts | Elmet Technologies

    Elmet Technologies provides high quality, precision machined molybdenum and tungsten components for front-end processing equipment used in the manufacture of semiconductors, including Ion Implantation, MOCVD, CVD, PVD, and MBE tools.[...]

  • Ion implantation-Edgetech Industries (A worldwide ...

    We are one of the world's largest source suppliers for ion implantation. The process for producing semiconductors usually takes place at high temperatures, with aggressive process gases and strong magnetic fields. Our components, made of molybdenum, tungsten, graphite, ceramics and steel, can withstand these harsh conditions.[...]

  • Lecture 5 Ion Implantation Reading: Chapter 5

    Georgia Tech ECE 6450 - Dr. Alan Doolittle Advantages of Ion Implantation: 1.) Very precise control of the dose 2.) Independent control of impurity depth and dose 3.) Very fast (1 12" wafer can take as little as 25 seconds for a moderate dose)[...]

  • Spare parts for ion implantation | Plansee

    Our heat-resistant components made from molybdenum, tungsten, graphite or ceramics excel due their ideal combination of corrosion resistance, material strength, high thermal conductivity and absolute purity. ... Components and spare parts for ion implantation.[...]

  • Hardening and Strain Localisation in Helium-Ion-Implanted ...

    implantation, a suppression of pile-up (< 30 nm) was seen around nano-indents in self-ion implanted samples [12]. This implies that helium-ion-implantation-induced defects have a unique effect on the deformation behaviour of tungsten due to a defect microstructure dissimilar to that formed during self-ion implantation.[...]

  • ANALYSIS OF TRITIUM/DEUTERIUM RETENTION AND …

    fluence at two different implantation temperatures and compared with the available correlations. Fig. 3.Thermodesorption spectra after an ion plasma implantation experiment (Tungsten). III.C. Erosion and Codeposition Effects in Beryllium As has been pointed out in the literature, erosion and codeposition are the major issues for Be, dominating[...]

  • Low flux and low energy helium ion implantation into ...

    Sep 15, 2016· 3.5. Preliminary results of He implantation in tungsten. In the present work the effect of two implantation parameters that could be easily varied in the home-made plasma source, i.e. incoming ion flux and total implanted fluence, has been studied by DB-PAS (vacancy defect formation) and NRA (He implanted amount).[...]

  • PROGRESS IN THE STUDY OF ION IRRADIATION IN TUNGSTEN …

    Abstract. The experimental study intends to generate data to validate the theoretical predictions on defect accumulation and recovery, as well as to investigate microstructural evolution and transmutant precipitation in mono- and poly-crystalline tungsten using ion implantation.[...]

  • Tungsten Wolfram W Heavy Alloy Parts For Ion Injection ...

    Tungsten Wolfram W Heavy Alloy Parts For Ion Injection Implantation, Find Complete Details about Tungsten Wolfram W Heavy Alloy Parts For Ion Injection Implantation,Tungsten Parts For Ion Injection,Wolfram Parts For Ion Implantation,Tungsten Parts For Ion Implanter from Other Metals & Metal Products Supplier or Manufacturer-Luoyang Kewei Tungsten & Molybdenum Co., Ltd.[...]

  • Ion implantation: New GSD source from Plansee | Plansee

    The GSD is a popular implanter system from Axcelis. Plansee stocks the appropriate implanter sources for all generations of GSD systems. Feedback from many users over the past years has shown that the standard source has plenty of room for improvement. Thus, Plansee has improved the source by increasing both its lifetime and efficiency. This redesign allows it to be used in any existing ...[...]

  • Material tuning for ion implantation. | Plansee

    Material tuning for ion implantation. 07/22/2013 ... This process, which is known as the halogen cycle, causes cooler tungsten components in the ion source to erode rapidly and leads to heavy tungsten deposits in other areas of the source. This results in shorting and can even cause the source to fail.[...]

  • Components & Spares for Ion Implantation | T&D Materials ...

    Jun 12, 2017· Tungsten & Molybdenum Components and Spares for Ion Implantation. T&D Materials Manufacturing supplies Tungsten and Molybdenum components and parts for ion implantation.. Ion implantation is an important process when manufacturing of semiconductors.Implanters dope wafers with "foreign atoms" in order to modify material properties such as conductivity or crystal structure.[...]

  • He ion implantation induced He bubbles and hardness in ...

    The pure tungsten was implanted with 500 keV helium (He) ions to a fluence of 1.0 × 10¹⁷ ions/cm² at RT and 800 °C. After the implantation, cross-sectional transmission electron microscope ...[...]

  • Ion implantation of deuterium in tungsten - ScienceDirect

    EI.SEVIER Journal of Nuclear Materials 220 222 (1995) 926-929 ima Ion implantation of deuterium in tungsten A.A. Pisarev, A.V. Varava, S.K. Zhdanov Moscow Engineering Physics Institute, Moscow 115409, Russian Federation Abstract Re-emission, accumulation and thermodesorption of deuterium in tungsten during ion bombardment were investigated in this …[...]

  • Advanced ion implanter spare parts - Plansee SE

    Find your replacement parts for ion implantation and other semiconductor applications. Precisely according to the OEM standards of all major manufacturers and advanced standard components from …[...]

  • He ion implantation induced He bubbles and hardness in ...

    The pure tungsten was implanted with 500 keV helium (He) ions to a fluence of 1.0 × 10 17 ions/cm 2 at RT and 800 °C. After the implantation, cross-sectional transmission electron microscope (TEM) and nano-indentation measurements were used to investigate the He bubbles and hardness profiles induced by He implantation.[...]

  • Ion Implantation Parts, Ion Implantation Parts Suppliers ...

    ion implantation tungsten part for semiconductor Product Show Description Ion implanter is the key equipment in making integrated circuit. Tungsten parts are key components in ion source system of semi conductor ion implanter to restrain and shield ionizing ray.[...]

  • Ion Implantation Components (Tungsten) - Stanford Advanced ...

    Ion implantation is an important process which is widely used in semiconductor device fabrication, metal finishing and materials science research. The components of ion implantation are often made of TZM, molybdenum, tungsten, because these materials could perform well in harsh environment. Applications: • Used to manufacture semiconductors.[...]

  • E/G Electro-Graph, USA | Plansee

    E/G Electro-Graph is our specialist in the field of modules and spare parts for ion implantation systems. The company has more than 2 000 components made from molybdenum, tungsten, tantalum, graphite and ceramics in its catalog.[...]

  • Helium-Ion-Implantation in Tungsten: Progress towards a ...

    Helium-Ion-Implantation in Tungsten: Progress towards a Coherent Understanding of the Damage Formed and its Effects on Properties F. Hofmanna,*, D. Nguyen-Manhb, ...[...]

  • Effects of nitrogen ion implantation time on tungsten ...

    Abstract. Nitrogen ion implantation time on tungsten thin film deposited on surface of AISI 410 steel has been performed. Tungsten thin film produced by dc magnetron sputtering method was deposited on AISI 410 martensitic stainless steel substrates, and then the nitrogen ions were implanted on tungsten …[...]

  • Tungsten contamination in ion implantation

    Abstract In this paper the tungsten contamination in ion implantation processes is studied by DLTS analysis both in typical operating conditions and after contamination of the implanter by implantation of wafers with an exposed tungsten layer.[...]

  • Temperature Dependence of Helium-Implantation-Induced ...

    using helium ion implantation. In metals the defect microstructure is dominated by the propensity of helium to form tightly bound configurations with vacancies [5, 6]. At temperatures below ~550 K vacancies in tungsten are immobile and do not cluster [7, 8].[...]

  • Ion Implantation, Ion Implantation Suppliers and ...

    Alibaba.com offers 193 ion implantation products. About 19% of these are tungsten sheets, 19% are other metals & metal products, and 15% are multi-functional beauty equipment. A wide variety of ion implantation options are available to you, such as free samples.[...]

  • Surface treatment by ion implantation ... - idonus sarl

    Case study: Ion implantation is particularly suitable for the hardening of sharp edges, and can be envisioned either as a subsitute or in combination with conventional coating. Hardion™ nitriding of tungsten carbide significantly increases wear resistance of cutting tools.[...]

  • Detection and reduction of tungsten contamination in ion ...

    In this paper the tungsten contamination in ion implantation processes is studied by DLTS analysis both in typical operating conditions and after contamination of the implanter by implantation of ...[...]

  • (PDF) Tungsten contamination in ion implantation

    In this paper the tungsten contamination in ion implantation processes is studied by DLTS analysis both in typical operating conditions and after contamination of the implanter by implantation of ...[...]

  • 3/4″ Pyrex, Twin Tungsten Filaments, Axcelis Style, Ion ...

    3/4″ Pyrex, Twin Tungsten Filaments, Axcelis Style, Ion Implantation. Our Bayard Alpert, G75PT ionization gauge is a 3/4" glass arm, twin tungsten filament gauge. The twin tungsten filaments operate at a very high temperature and are relatively insensitive to contamination found in implanter or sputtering systems.[...]